Sensors and Transducers

MEMS Sensors Introduction

MEMS Sensor components, fabrications

Prof. (Dr.) Anil Kumar Bag
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Highlights
  • While integrated circuits are designed to exploit the electrical properties of silicon, MEMS takes advantage of either silicon’s mechanical properties or both its electrical and mechanical properties.
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ByProf. (Dr.) Anil Kumar Bag
Professor, Dept. of Applied Electronics and Instrumentation Engineering, Heritage Institute of Technology, Kolkata
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B. Sc. (Physics Hons) CU, B. Tech. (Instrumentation Engineering, CU), M. Tech. (Instrumentation and Control Engineering, CU), PhD (Electronics and Instrumentation Engineering, JU)
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